Conference

Basic information

Name Yagi Yoichiro
Belonging department
Occupation name
researchmap researcher code 1000229028
researchmap agency Okayama University of Science

Title

Monte carlo simulation for Analyses of Thermal Desorption of Hydrogen from Si(100) -H Surface

Author

Y. Yagi, H. Kaji, K. Kakitani and A. Yoshimori

Journal

International Symposium on Surface Science for Micro- and Nano-Device Fabrication

Publication Date

1999/11

Invited

Language

English

学会講演(シンポジウム・セミナー含む)

Conference Class

Domestic conferences

Conference Type

Poster sessions

Promoter

Venue

東京

URL

Summary