Academic Thesis

Basic information

Name Muramoto Tetsuya
Belonging department
Occupation name
researchmap researcher code 1000311528
researchmap agency Okayama University of Science

Title 

Surface Model Dependence in Sputtering Simulation

					

					

						

							

								

									
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Author 

									
								

							

						

						
T. Muramoto and T. Kenmotsu

					

					

						

							

								

									
Summary 

									
								

							

						

						

					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
Journal of the Vacuum Society of Japan

					

					

						

							

								

									
Publisher 

									
								

							

						

						
日本真空学会

					

					

						

							

								

									
Volume 

									
								

							

						

						
51

					

					

						

							

								

									
Number Of Pages 

									
								

							

						

						
4

					

					

						

							

								

									
StartingPage 

									
								

							

						

						
246

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
249

					

					

						

							

								

									
Date of Issue 

									
								

							

						

						
2008/04

					

					

						

							

								

									
Referee 

									
								

							

						

						
Exist

					

					

						

							

								

									
Invited 

									
								

							

						

						
Exist

					

					

						

							

								

									
Language 

									
								

							

						

						
Japanese

					

					

						

							

								

									
Thesis　Type 

									
								

							

						

						
Research papers (other academic conferences' materials and others)

					

					

						

							

								

									
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