Academic Thesis

Basic information

Name Sato Yasushi
Belonging department
Occupation name
researchmap researcher code 6000010708
researchmap agency Okayama University of Science

Title 

Spatial distribution of electrical properties for Al-doped ZnO films deposited by dc magnetron sputtering using various inert gases 

					

					

						

							

								

									
Bibliography　Type 

									
								

							

						

						

					

					

						

							

								

									
Author 

									
								

							

						

						
Y. Sato, K. Ishihara, N. Oka, and Y. Shigesato

					

					

						

							

								

									
Summary 

									
								

							

						

						


Spatial distribution of electrical properties for Al-doped ZnO films deposited by dc magnetron sputtering using various inert gases 


					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
Journal of Vacuum Science & Technology A

					

					

						

							

								

									
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Volume 

									
								

							

						

						
28

					

					

						

							

								

									
Number Of Pages 

									
								

							

						

						
4

					

					

						

							

								

									
StartingPage 

									
								

							

						

						
895

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
900

					

					

						

							

								

									
Date of Issue 

									
								

							

						

						
2010/07

					

					

						

							

								

									
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Exist

					

					

						

							

								

									
Invited 

									
								

							

						

						
Not exist

					

					

						

							

								

									
Language 

									
								

							

						

						
English

					

					

						

							

								

									
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Research papers (academic journals)

					

					

						

							

								

									
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