Electrical and Optical properties of Nb-doped TiO2 films deposited by dc magnetron sputtering using slightly reduced Nb-doped TiO2-x ceramic targets

Y. Sato, Y. Sanno, C. Tasaki, N. Oka, T. Kamiyama and Y. Shigesato

Electrical and Optical properties of Nb-doped TiO2 films deposited by dc magnetron sputtering using slightly reduced Nb-doped TiO2-x ceramic targets

Journal of Vacuum Science & Technology A

28

4

851

855