Competitive research funds

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title

成膜法およびプラズマ電源の開発

Provider

東京電子(株)

System

受託研究

From Date

2020/04

To Date

2021/03

OwnerRole

 

Author

中谷達行

Category

Summary

URL