Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Difference of deposition process of an amorphous carbon film due to source gases

					

					

						

							

								

									
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第22回プラズマ材料科学シンポジウム

					

					

						

							

								

									
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2009/06

					

					

						

							

								

									
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Poster sessions

					

					

						

							

								

									
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東京大学

					

					

						

							

								

									
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Summary