Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Etcing Characteristics of Diamond-like carbon for Bio-chip Application in Fluorocarbon Plasmas

					

					

						

							

								

									
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Plasma Science Syimposium 2009 / The 26th Symposium on Plasma Processing (SPP-26)

					

					

						

							

								

									
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2009/02

					

					

						

							

								

									
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Poster sessions

					

					

						

							

								

									
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名古屋大学

					

					

						

							

								

									
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Summary