Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title

原料によるアモルファス炭素膜の堆積過程のちがい

Author

Journal

電気学会プラズマ研究会

Publication Date

2009/08

Invited

Language

Conference Class

Conference Type

Verbal presentations (general)

Promoter

Venue

同志社大学

URL

Summary