Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Oxidation process of an amorphous carbon film

					

					

						

							

								

									
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The 27th Symposium on Plasma Processing SPP-27

					

					

						

							

								

									
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2010/02

					

					

						

							

								

									
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Poster sessions

					

					

						

							

								

									
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横浜

					

					

						

							

								

									
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Summary