Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title

Interactions between Hydrogen Plasma and Amorphous Carbon Films

Author

Journal

The 27th Symposium on Plasma Processing SPP-27

Publication Date

2010/02

Invited

Language

Conference Class

Conference Type

Poster sessions

Promoter

Venue

横浜

URL

Summary