Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Source Molecular Effect on Amorphous Carbon Film Deposition

					

					

						

							

								

									
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Journal 

									
								

							

						

						
Nagasaki Symposium on Nano-Dynamics 2009 (NSND-2009)

					

					

						

							

								

									
Publication Date 

									
								

							

						

						
2009/01

					

					

						

							

								

									
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Venue 

									
								

							

						

						
Nagasaki University

					

					

						

							

								

									
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Summary 

									
								

							

						

						
p.38-39