Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Substrate Bias Effect on Deposition Process of Amorphous Carbon Films

					

					

						

							

								

									
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Nagasaki Symposium on Nano-Dynamics 2009 (NSND-2009)

					

					

						

							

								

									
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2009/01

					

					

						

							

								

									
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Venue 

									
								

							

						

						
Nagasaki University

					

					

						

							

								

									
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Summary 

									
								

							

						

						
p.36-37