Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Dependence of Adsorption of Hydrocarbon Species during PECVD on Substrate Temperatures

					

					

						

							

								

									
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18th International Symposium on Plasma Chemistry (ISPC-18)

					

					

						

							

								

									
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2007/08

					

					

						

							

								

									
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Venue 

									
								

							

						

						
Kyoto, Japan

					

					

						

							

								

									
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Summary 

									
								

							

						

						
p28