Conference
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The 2nd Harmonic ECR Microplasma in Narrow Closed Space for Low Pressure Conditions
Hiroshi Fujiyama, Akihiro Yukishige, Ke Yan, Masanori Shinohara, Tatsuyuki Nakatani
61st Annual Gaseous Electronics Conference
2008/10
English
Verbal presentations (general)
Dallas, Texas
Abstract: SR1.00006 |
