Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

HiPIMS用パルス電源の技術

					

					

						

							

								

									
Author 

									
								

							

						

						
黒岩雅英，中谷達行

					

					

						

							

								

									
Journal 

									
								

							

						

						
VACUUM2016真空展 出展者ワークショップ

					

					

						

							

								

									
Publication Date 

									
								

							

						

						
2016/09

					

					

						

							

								

									
Invited 

									
								

							

						

						

					

					

						

							

								

									
Language 

									
								

							

						

						
Japanese

					

					

						

							

								

									
  

									
								

							

						

						

					

					

						

							

								

									
Conference Class 

									
								

							

						

						

					

					

						

							

								

									
Conference Type 

									
								

							

						

						
Others

					

					

						

							

								

									
Promoter 

									
								

							

						

						

					

					

						

							

								

									
Venue 

									
								

							

						

						
横浜

					

					

						

							

								

									
URL 

									
								

							

						

						

					

					

						

							

								

									
Summary