Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

HiPIMS法を用いたDLC成膜におけるピーク電力密度に及ぼすパルス条件の影響

					

					

						

							

								

									
Author 

									
								

							

						

						
山本耕平，中谷達行，岡野忠之，黒岩雅英

					

					

						

							

								

									
Journal 

									
								

							

						

						
表面技術協会第135回講演大会

					

					

						

							

								

									
Publication Date 

									
								

							

						

						
2017/03

					

					

						

							

								

									
Invited 

									
								

							

						

						

					

					

						

							

								

									
Language 

									
								

							

						

						
Japanese

					

					

						

							

								

									
  

									
								

							

						

						

					

					

						

							

								

									
Conference Class 

									
								

							

						

						
Domestic conferences

					

					

						

							

								

									
Conference Type 

									
								

							

						

						
Poster sessions

					

					

						

							

								

									
Promoter 

									
								

							

						

						

					

					

						

							

								

									
Venue 

									
								

							

						

						
埼玉

					

					

						

							

								

									
URL 

									
								

							

						

						

					

					

						

							

								

									
Summary