Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

バイポーラHiPIMS法を用いたDLC成膜における放電特性

					

					

						

							

								

									
Author 

									
								

							

						

						
福江紘幸，中谷達行，岡野忠之，黒岩雅英

					

					

						

							

								

									
Journal 

									
								

							

						

						
平成 29 年度(第 68 回)電気・情報関連学会中国支部連合大会

					

					

						

							

								

									
Publication Date 

									
								

							

						

						
2017/10

					

					

						

							

								

									
Invited 

									
								

							

						

						

					

					

						

							

								

									
Language 

									
								

							

						

						
Japanese

					

					

						

							

								

									
  

									
								

							

						

						

					

					

						

							

								

									
Conference Class 

									
								

							

						

						
Domestic conferences

					

					

						

							

								

									
Conference Type 

									
								

							

						

						
Verbal presentations (general)

					

					

						

							

								

									
Promoter 

									
								

							

						

						

					

					

						

							

								

									
Venue 

									
								

							

						

						
岡山

					

					

						

							

								

									
URL 

									
								

							

						

						

					

					

						

							

								

									
Summary