Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Influence on discharge properties with the reactive gas in the DLC film formation using the HiPIMS method

					

					

						

							

								

									
Author 

									
								

							

						

						
Masahide Kuroiwa, Tadayuki Okano, Tatsuyuki Nakatani, Hiroyuki Fukue

					

					

						

							

								

									
Journal 

									
								

							

						

						
Plasma Conference 2017

					

					

						

							

								

									
Publication Date 

									
								

							

						

						
2017/11

					

					

						

							

								

									
Invited 

									
								

							

						

						

					

					

						

							

								

									
Language 

									
								

							

						

						
English

					

					

						

							

								

									
  

									
								

							

						

						

					

					

						

							

								

									
Conference Class 

									
								

							

						

						
Domestic conferences

					

					

						

							

								

									
Conference Type 

									
								

							

						

						
Poster sessions

					

					

						

							

								

									
Promoter 

									
								

							

						

						

					

					

						

							

								

									
Venue 

									
								

							

						

						
姫路

					

					

						

							

								

									
URL 

									
								

							

						

						

					

					

						

							

								

									
Summary