Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Influence of Bias Voltage on Substrate Current Density of DLC Films by High-Power Impulse Magnetron Sputtering Method

					

					

						

							

								

									
Author 

									
								

							

						

						
Hiroyuki Fukue, Tatsuyuki Nakatani, Tadayuki Okano and Masahide Kuroiwa

					

					

						

							

								

									
Journal 

									
								

							

						

						
Plasma Conference 2017

					

					

						

							

								

									
Publication Date 

									
								

							

						

						
2017/11

					

					

						

							

								

									
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Language 

									
								

							

						

						
English

					

					

						

							

								

									
  

									
								

							

						

						

					

					

						

							

								

									
Conference Class 

									
								

							

						

						
Domestic conferences

					

					

						

							

								

									
Conference Type 

									
								

							

						

						
Poster sessions

					

					

						

							

								

									
Promoter 

									
								

							

						

						

					

					

						

							

								

									
Venue 

									
								

							

						

						
姫路

					

					

						

							

								

									
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Summary