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| Basic information |
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| Name |
Nakatani Tatsuyuki |
| Belonging department |
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| Occupation name |
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| researchmap researcher code |
B000236977 |
| researchmap agency |
Okayama University of Science |
Micro-arcing rate of DLC films using bipolar HiPIMS method
Hiroyuki Fukue, Tatsuyuki Nakatani, Tadayuki Okano and Masahide Kuroiwa
10th Anniversary International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials 11th International Conference on Plasma-Nano Technology & Science (ISPlasma2018/IC-PLANTS2018)
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