Synthesis of Hydrogenated Amorphous Carbon Nanoparticles using High-Pressure CH4+Ar Plasmas and Their Deposition
Kazunori Koga, S.H. Hwang, K. Kamataki, N. Itagaki, T. Nakatani
AVS 65th International Symposium and Exhibition (AVS 65), Plasma Science and Technology Division
CA