Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Spectroscopic Investigation of Pressure Gradient Sputtering System

					

					

						

							

								

									
Author 

									
								

							

						

						
J-S. Oh, O. Oota, K. TakahashiK, K. Koga, T. Nakatani, M. Ito, M. Shiratani, T. Shirafuji, and K. Yonezawa

					

					

						

							

								

									
Journal 

									
								

							

						

						
28th Annual Meeting of MRS-J, C-3:Frontier of Nano-Materials Based on Advanced Plasma Technologies

					

					

						

							

								

									
Publication Date 

									
								

							

						

						
2018/12

					

					

						

							

								

									
Invited 

									
								

							

						

						

					

					

						

							

								

									
Language 

									
								

							

						

						
English

					

					

						

							

								

									
  

									
								

							

						

						

					

					

						

							

								

									
Conference Class 

									
								

							

						

						
Domestic conferences

					

					

						

							

								

									
Conference Type 

									
								

							

						

						
Poster sessions

					

					

						

							

								

									
Promoter 

									
								

							

						

						

					

					

						

							

								

									
Venue 

									
								

							

						

						
Kitakyushu, Japan

					

					

						

							

								

									
URL 

									
								

							

						

						

					

					

						

							

								

									
Summary