Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

ターゲットの物理的組成が及ぼすHiPIMSの平均電力密度特性

					

					

						

							

								

									
Author 

									
								

							

						

						
黒岩雅英，岡野忠之，福江紘幸，中谷達行

					

					

						

							

								

									
Journal 

									
								

							

						

						
2018年日本表面真空学会学術講演会

					

					

						

							

								

									
Publication Date 

									
								

							

						

						
2018/11

					

					

						

							

								

									
Invited 

									
								

							

						

						

					

					

						

							

								

									
Language 

									
								

							

						

						
Japanese

					

					

						

							

								

									
  

									
								

							

						

						

					

					

						

							

								

									
Conference Class 

									
								

							

						

						
Domestic conferences

					

					

						

							

								

									
Conference Type 

									
								

							

						

						
Verbal presentations (general)

					

					

						

							

								

									
Promoter 

									
								

							

						

						

					

					

						

							

								

									
Venue 

									
								

							

						

						
神戸国際会議場

					

					

						

							

								

									
URL 

									
								

							

						

						

					

					

						

							

								

									
Summary