Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Effects of hydrogen plasma treatment on amorphous carbon films

					

					

						

							

								

									
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Journal 

									
								

							

						

						
The 26th Symposium on Plasma Processing (SPP-26)

					

					

						

							

								

									
Publication Date 

									
								

							

						

						
2007/02

					

					

						

							

								

									
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Conference Type 

									
								

							

						

						
Poster sessions

					

					

						

							

								

									
Promoter 

									
								

							

						

						

					

					

						

							

								

									
Venue 

									
								

							

						

						
名古屋大学

					

					

						

							

								

									
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Summary