Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Dependence of adsorption of hydrocarbon species generated in a methane plasma on substrate temperatures

					

					

						

							

								

									
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The 26th Symposium on Plasma Processing (SPP-26)

					

					

						

							

								

									
Publication Date 

									
								

							

						

						
2007/02

					

					

						

							

								

									
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Poster sessions

					

					

						

							

								

									
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Venue 

									
								

							

						

						
名古屋大学

					

					

						

							

								

									
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Summary