Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Tube Inner Sputter Coating by Low-Pressure Microplasma

					

					

						

							

								

									
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第20回プラズマ材料科学シンポジウム

					

					

						

							

								

									
Publication Date 

									
								

							

						

						
2007/06

					

					

						

							

								

									
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Conference Type 

									
								

							

						

						
Verbal presentations (general)

					

					

						

							

								

									
Promoter 

									
								

							

						

						

					

					

						

							

								

									
Venue 

									
								

							

						

						
名古屋大学

					

					

						

							

								

									
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Summary