Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title

アモルファス炭素膜成膜中の水素の引き抜き効果

Author

Journal

2008年春季 第55回応用物理学関係連合講演会

Publication Date

2008/03

Invited

Language

Conference Class

Conference Type

Verbal presentations (general)

Promoter

Venue

日本大学

URL

Summary