Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

アモルファス炭素膜の成膜機構

					

					

						

							

								

									
Author 

									
								

							

						

						

					

					

						

							

								

									
Journal 

									
								

							

						

						
電気学会プラズマ研究会

					

					

						

							

								

									
Publication Date 

									
								

							

						

						
2008/07

					

					

						

							

								

									
Invited 

									
								

							

						

						

					

					

						

							

								

									
Language 

									
								

							

						

						

					

					

						

							

								

									
  

									
								

							

						

						

					

					

						

							

								

									
Conference Class 

									
								

							

						

						

					

					

						

							

								

									
Conference Type 

									
								

							

						

						
Verbal presentations (general)

					

					

						

							

								

									
Promoter 

									
								

							

						

						

					

					

						

							

								

									
Venue 

									
								

							

						

						
広島工業大学

					

					

						

							

								

									
URL 

									
								

							

						

						

					

					

						

							

								

									
Summary