Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title

アモルファス炭素膜堆積の基板温度依存性

Author

Journal

表面技術協会第118回講演大会

Publication Date

2008/09

Invited

Language

Conference Class

Conference Type

Verbal presentations (general)

Promoter

Venue

近畿大学

URL

Summary