Academic Thesis

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Pulsed Suputter-Coating of Inside Wall of Narrow Tubu by the 2nd Harmonic ECR Plasmas

					

					

						

							

								

									
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Author 

									
								

							

						

						
H.Fujiyama, H.Uchida, M.Kumamoto, Y.Nitta, T.Nakatani, M.Shinohara, Y.Matsuda

					

					

						

							

								

									
Summary 

									
								

							

						

						





					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
Proc.5th Asian-European Int.Conf.on Plasma Surface Engineering

					

					

						

							

								

									
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S12

					

					

						

							

								

									
EndingPage 

									
								

							

						

						

					

					

						

							

								

									
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2005

					

					

						

							

								

									
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Language 

									
								

							

						

						
English

					

					

						

							

								

									
Thesis　Type 

									
								

							

						

						
Research papers (proceedings of international meetings)

					

					

						

							

								

									
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