Academic Thesis

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Characterization of Carbon Thin Films Prepared by High Power Impulse Magnetron Sputtering

					

					

						

							

								

									
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Author 

									
								

							

						

						
Norio NAWACHI, Koichi ITOH, Yosuke ISAGI, Yoshiaki YOSHIDA, Keishi OKAMOTO and Tatsuyuki NAKATANI

					

					

						

							

								

									
Summary 

									
								

							

						

						

					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
Journal of the Vacuum Society of Japan

					

					

						

							

								

									
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Volume 

									
								

							

						

						
60

					

					

						

							

								

									
Number Of Pages 

									
								

							

						

						
9

					

					

						

							

								

									
StartingPage 

									
								

							

						

						
341

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
345

					

					

						

							

								

									
Date of Issue 

									
								

							

						

						
2017/09

					

					

						

							

								

									
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Exist

					

					

						

							

								

									
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Language 

									
								

							

						

						
Japanese

					

					

						

							

								

									
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Research papers (academic journals)

					

					

						

							

								

									
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