Academic Thesis

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

大電力パルススパッタリング法を用いたDLC成膜におけるパルス放電条件の最適化

					

					

						

							

								

									
Bibliography　Type 

									
								

							

						

						

					

					

						

							

								

									
Author 

									
								

							

						

						
福江紘幸，中谷達行，岡野忠之，黒岩雅英

					

					

						

							

								

									
Summary 

									
								

							

						

						

					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
岡山理科大学技術科学研究所年報

					

					

						

							

								

									
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Volume 

									
								

							

						

						
36

					

					

						

							

								

									
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StartingPage 

									
								

							

						

						
1

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
9

					

					

						

							

								

									
Date of Issue 

									
								

							

						

						
2018/02

					

					

						

							

								

									
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Invited 

									
								

							

						

						

					

					

						

							

								

									
Language 

									
								

							

						

						
Japanese

					

					

						

							

								

									
Thesis　Type 

									
								

							

						

						
Research papers (publications of university or research institution)

					

					

						

							

								

									
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