Academic Thesis

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Spatial distribution diagnosis of plasma by emission spectroscopy in DLC films formation using bipolar HiPIMS method

					

					

						

							

								

									
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Author 

									
								

							

						

						
Hiroyuki Fukue, Yuga Koyama, Tadayuki Okano, Masahide Kuroiwa, Shinsuke Kunitsugu, Tatsuyuki Nakatani

					

					

						

							

								

									
Summary 

									
								

							

						

						





					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
ROCEEDINGS of The 15th International Symposium on Sputtering and Plasma Processes (ISSP2019)

					

					

						

							

								

									
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175

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
176

					

					

						

							

								

									
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2019/06

					

					

						

							

								

									
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Language 

									
								

							

						

						
English

					

					

						

							

								

									
Thesis　Type 

									
								

							

						

						
Research papers (proceedings of international meetings)

					

					

						

							

								

									
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