Academic Thesis

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

反応性大電力パルススパッタリングにおけるDLC成膜の放電特性

					

					

						

							

								

									
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Author 

									
								

							

						

						
福江紘幸, 岡野忠之, 黒岩雅英, クルモフ バレリー, 中谷達行

					

					

						

							

								

									
Summary 

									
								

							

						

						

					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
岡山理科大学紀要 A

					

					

						

							

								

									
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Number Of Pages 

									
								

							

						

						
自然科学 第54号

					

					

						

							

								

									
StartingPage 

									
								

							

						

						
37

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
41

					

					

						

							

								

									
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2019/02

					

					

						

							

								

									
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Language 

									
								

							

						

						
Japanese

					

					

						

							

								

									
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Research papers (publications of university or research institution)

					

					

						

							

								

									
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