Academic Thesis

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Effects of Substrate Temperatures on Adsorption of Hydrocarbon Species Generated in Methane Plasma

					

					

						

							

								

									
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Author 

									
								

							

						

						
M. Shinohara, K. Cho, Y. Matsuda, H. Fujiyama, K. Okamoto, T. Nakatani

					

					

						

							

								

									
Summary 

									
								

							

						

						





					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
Transactions of the Materials Research Society of Japan

					

					

						

							

								

									
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Volume 

									
								

							

						

						
32

					

					

						

							

								

									
Number Of Pages 

									
								

							

						

						
2

					

					

						

							

								

									
StartingPage 

									
								

							

						

						
473

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
476

					

					

						

							

								

									
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2006/00

					

					

						

							

								

									
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Exist

					

					

						

							

								

									
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Language 

									
								

							

						

						
English

					

					

						

							

								

									
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Research papers (academic journals)

					

					

						

							

								

									
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