Academic Thesis

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Investigation of evolution hydrocarbon species on a Si surface during methane plasma with and without substrate bias, using infrared spectroscopy in multiple internal reflection geometry

					

					

						

							

								

									
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Author 

									
								

							

						

						
M. Shinohara, H. Shibata, Ken Cho, T. Nakatani , K. Okamoto,  Y. Matsuda, and H. Fujiyama

					

					

						

							

								

									
Summary 

									
								

							

						

						





					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
Applied Surface Science

					

					

						

							

								

									
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Volume 

									
								

							

						

						
253

					

					

						

							

								

									
Number Of Pages 

									
								

							

						

						
14

					

					

						

							

								

									
StartingPage 

									
								

							

						

						
6242

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
6247

					

					

						

							

								

									
Date of Issue 

									
								

							

						

						
2007/00

					

					

						

							

								

									
Referee 

									
								

							

						

						
Exist

					

					

						

							

								

									
Invited 

									
								

							

						

						

					

					

						

							

								

									
Language 

									
								

							

						

						
English

					

					

						

							

								

									
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Research papers (academic journals)

					

					

						

							

								

									
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