Academic Thesis

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Low-pressure Micro Plasma Generation using Microwave in Mirror-type Magnetic Fields

					

					

						

							

								

									
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Author 

									
								

							

						

						
H. Fujiyama, D. Kurogi, Y. Furue, T. Nakatani

					

					

						

							

								

									
Summary 

									
								

							

						

						

The 6th International Conference on Reactive Plasmas /23rd Symposium on Plasma Processing



					

					

						

							

								

									
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Proceedings of the 6th International Conference on Reactive Plasmas /23rd Symposium on Plasma Processing (ICRP-6 / SPP-23)

					

					

						

							

								

									
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199

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
200

					

					

						

							

								

									
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2006/00

					

					

						

							

								

									
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Language 

									
								

							

						

						
English

					

					

						

							

								

									
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Research papers (proceedings of international meetings)

					

					

						

							

								

									
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