Patents

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Name 

多重磁極マグネトロンスパッタリング成膜装置及びその成膜方法

					

					

						

							

								

									
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特願2005-127695

					

					

						

							

								

									
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2005/00

					

					

						

							

								

									
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PatentID 

									
								

							

						

						
特許第4933744号

					

					

						

							

								

									
Date of issue 

									
								

							

						

						
2012/02

					

					

						

							

								

									
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Summary 

									
								

							

						

						

					

					

						

							

								

									
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