Patents

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Name 

プラズマ発生装置, 表面処理装置, 光源, プラズマ発生方法, 表面処理方法および光照射方法

					

					

						

							

								

									
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ApplicationID 

									
								

							

						

						
特願2005-270014

					

					

						

							

								

									
ApplicationDate 

									
								

							

						

						
2005/09

					

					

						

							

								

									
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PatentID 

									
								

							

						

						
特許第5336691号

					

					

						

							

								

									
Date of issue 

									
								

							

						

						
2013/08

					

					

						

							

								

									
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Summary 

									
								

							

						

						

					

					

						

							

								

									
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