Academic Thesis

Basic information

Name Nakamura Osamu
Belonging department
Occupation name
researchmap researcher code B000300963
researchmap agency Okayama University of Science

Title 

Development of Thin-Film Ta-Si-O-N Resistor Heater

					

					

						

							

								

									
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Author 

									
								

							

						

						
田中幸一　竹山啓之  寺崎　努　中村　修

					

					

						

							

								

									
Summary 

									
								

							

						

						

					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
電気学会論文誌E

					

					

						

							

								

									
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Volume 

									
								

							

						

						
１２８

					

					

						

							

								

									
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StartingPage 

									
								

							

						

						
355

					

					

						

							

								

									
EndingPage 

									
								

							

						

						

					

					

						

							

								

									
Date of Issue 

									
								

							

						

						
2005/00

					

					

						

							

								

									
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Exist

					

					

						

							

								

									
Invited 

									
								

							

						

						
Not exist

					

					

						

							

								

									
Language 

									
								

							

						

						
Japanese

					

					

						

							

								

									
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