Conference

Basic information

Name Terano Motoki
Belonging department
Occupation name
researchmap researcher code 7000018142
researchmap agency Okayama University of Science

Title

Effects Of External Hydrostatic Pressure On Finished Surface In Silicon Cutting

Author

Masahiko Yoshino, Youhei Shimizu, Kentarou Kouno, Motoki Terano

Journal

ICTMP 2014

Publication Date

2014

Invited

Language

English

学会講演(シンポジウム・セミナー含む)

Conference Class

International conferences

Conference Type

Verbal presentations (general)

Promoter

Venue

URL

Summary

査読あり