Mg2Si Thermoelectric Device Fabrication with Reused-silicon

S.Nakamura, Y. Mori, K. Takarabe

Mg2Si　 Thermoelectric
doi:10.7567/JJAPCP.3.011202
International Conference and Summer School on Advanced Silicide Technology 2014, July 19?21, 2014, Tokyo, Japan
Mg2Si Thermoelectric Device Fabrication with Reused-silicon

JJAP Conf. Proc.

3

011202-1

011202-7