Cluster ion, Surface smoothing
The smoothing effect due to cluster impact with a few eV/atom is studied through molecular dynamics simulations, where (Ar)3055 clusters with 3–10 eV/atom are bombarded on a rough Cu surface. In order to describe the rough surface at an initial state, we employ the fractal surface with dimension 2.5. The fractal dimension of the irradiated surface is reduced due to both 3 and 10 eV/atom cluster bombardments. In the former case, the smoothing takes place due to pressing, and in the latter case, melting near the surface causes the smoothing.
COSIRES2002
