Atomic forced microscopy and transmission electron microscopy observations on　the early stages of Sn-doped In2O3 film growth deposited on a-SiO2 surface by dc magnetron sputtering

Y. Sato, N. Oka, S. Nakamura, and Y. Shigesato

8th International Symposium on Transparent Oxide and Related Materials for Electronics and Optics (TOEO-8)

Tokyo, Japan