Relationship between current-voltage characteristics and film quality in medical ta-C:H film using CVA method

Michio Wakae, Shinsuke Kunitsugu, Tatsuyuki Nakatani

The joint Symposium of The 9th Asia-pacific International Symposium on the Basics and Application of Plasma Technology (APSPT-9) and the 28th Symposium on Plasma Science for materials (SPSM-28)

Japan

P2-31