Pressure Gradient Sputtering to Achieve High Deposition Rate for Metal Thin Film

Hiroki Oota, Kiyomi Takahashi, Jun-Seok Oh, Kazunori Koga, Tatsuyuki Nakatani, Masafumi Ito, Masaharu Shiratani, and Ken Yonezawa

10th Anniversary International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials 11th International Conference on Plasma-Nano Technology & Science (ISPlasma2018/IC-PLANTS2018)

Nagoya, Japan