Film Surface Analysis of Ultralow Friction of ta-C:H Film Deposited by Cathodic Vacuum Arc Plasma

Muhammad Aminurul Helmy, Shinsuke Kunitsugu, Tatsuyuki Nakatani

The 11th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-11)

The Kanazawa Chamber of Commerce and Industry, Kanazawa, Japan