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| 基本情報 |
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| 氏名 |
中谷 達行 |
| 氏名（カナ） |
ﾅｶﾀﾆ ﾀﾂﾕｷ |
| 氏名（英語） |
Nakatani Tatsuyuki |
| 所属 |
機構 研究社会連携機構 ﾌﾛﾝﾃｨｱ理工学研 |
| 職名 |
教授 |
| researchmap研究者コード |
B000236977 |
| researchmap機関 |
岡山理科大学 |
Deposition of super-hard titanium carbide thin films by cathodic vacuum arc plasma
SHINTAROU HARA, KEISHI OKAMOTO AND TATSUYUKI NAKATANI
7th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 8th International Conference on Plasma Nanotechnology and Science (ISPlasma2015 / IC-PLANTS2015)
Proceedings of the 7th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials (ISPlasma2015)
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