Chemical Structural Analysis of Diamondlike Carbon Films with Different Electrical Resistivities by X-ray Photoelectron Spectroscopy
Susumu Takabayashi, Keishi Okamoto, Kenya Shimada, Kunihiko Motomitsu, Hiroaki Motoyama, Tatsuyuki Nakatani, Hiroyuki Sakaue, Hitoshi Suzuki, and Takayuki Takahagi
Japanese Journal of Applied Physics
47
5
3376
3379