Source Molecular Effect on Amorphous Carbon Film Deposition
H. Kawazoe, T. Inayoshi, M. Shinohara, Y. Matsuda, H. Fujiyama, Y. Nitta and T. Nakatani
Nagasaki Symposium on Nano-Dynamics 2009 (NSND-2009)
Proc. Nagasaki Symposium on Nano-Dynamics 2009
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